Piezoelectric bimorph MEMS speakers
نویسندگان
چکیده
One of the key requirements for MEMS speakers is to increase sound pressure level (SPL) while keeping size as small possible. In this paper we present a speaker based on piezoelectric bimorph cantilevers that produces higher SPL than conventional unimorph cantilever speakers. The active diaphragm 1.4 × mm2. are connected in parallel make full use actuation voltage. At 1 kHz, measured reached 73 dB and peak 102 at resonance frequency 10 kHz 711 ear simulator under driving voltage Vrms. total harmonic distortion was less 3% range from 100 Hz 20 kHz. Although absolute not highest, work provides better all
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ژورنال
عنوان ژورنال: Nanotechnology and Precision Engineering
سال: 2022
ISSN: ['2589-5540', '1672-6030']
DOI: https://doi.org/10.1063/10.0013406